Patent Number: 6,308,557

Title: Device scanning in a raster mode, with compensation of disturbing effects of mechanical vibrations on the scanning process

Abstract: A device which scans in a raster mode, in particular to a raster microscope, provides a rapid and inexpensive compensation of the disturbing effects of mechanical vibrations on the scanning process. The device includes a sensor for sensing mechanical vibrations and driving a filter whose output, together with the output of the device for the production of a z-signal, is connected to an adder, the output of which drives the device for changing the distance between the specimen and the sensor.

Inventors: Heiland; Peter (D-65479 Raunheim, DE)

Assignee:

International Classification: G12B 21/24 (20060101); G12B 21/20 (20060101); G12B 21/00 (20060101); G12B 21/02 (20060101); G01D 003/28 (); G01B 021/16 (); G01B 021/30 ()

Expiration Date: 10/30/2018