Patent Number: 6,308,568

Title: Angular velocity sensor

Abstract: An angular velocity sensor including a framelike vibrator supported on a fixed support portion via a pair of beams. The framelike vibrator is placed into an inertial state by being vibrated by a driving means, and a displacement of the framelike vibrator due to Coriolis force is detected. The fixed support portion is formed on a support substrate made of a material having a different coefficient of thermal expansion in the center of the framelike vibrator, and the beams are T-shaped and include a first beam portion for displacing the framelike vibrator by the driving means in the driving direction, and a second beam portion for displacing the framelike vibrator in the direction of generation of the Coriolis force.

Inventors: Moriya; Kazufumi (Yokohama, JP)

Assignee: Murata Manufacturing Co., Ltd.

International Classification: G01C 19/56 (20060101); G01C 019/00 ()

Expiration Date: 10/30/2018