Patent Number: 6,308,573

Title: 3-Dimensional comb structure and actuator and inertia detection sensor both using the comb structure

Abstract: A 3-dimensional comb structure using an electrical force, and an inertial detection sensor and an actuator both using the 3-dimensional comb structure are provided. In the 3-dimensional comb structure, a suspension structure, which is an inertia body, is separated a predetermined height from a substrate, maintaining the predetermined height from the substrate. A movable comb, which has at least one movable comb finger, protrudes perpendicularly from the suspension structure. A fixed comb, which has at least one fixed comb finger, protrudes perpendicularly from the substrate, in mesh with the movable comb. The 3-dimensional comb structure is driven by a voltage provided from a power supply unit which is connected to the movable comb and the fixed comb.

Inventors: Lee; Ki Bang (Seoul, KR), Choi; Jae-joon (Sungnam, KR), Jeong; Hee-moon (Yongin, KR), Kim; Kyu-yong (Sungnam, KR), Kang; Sung-gyu (Suwon, KR)

Assignee: Samsung Electronics Co., Ltd.

International Classification: B41J 2/16 (20060101); B81B 3/00 (20060101); G01P 15/08 (20060101); G01C 19/56 (20060101); G01P 15/10 (20060101); G01P 15/097 (20060101); G01P 15/125 (20060101); H02N 1/00 (20060101); G01P 003/44 (); G11B 005/55 ()

Expiration Date: 10/30/2018