Patent Number: 6,308,577

Title: Circuit and method of compensating for membrane stress in a sensor

Abstract: A circuit and method for correcting a sense signal of a sensor (100) where the sense signal is reduced by a negative nonlinear error component introduced by membrane stress in a sensor structure (101). A first transducer (103) is disposed at a location (203) having substantial bending stress to produce a sense signal having a linear component and the nonlinear error component. A second transducer (102) is disposed at a location (202) with substantially zero bending stress to produce a sense signal having the nonlinear error component but a substantially zero linear component. The sense signal from the second transducer (102) is added to the sense signal from the first transducer (103) to correct the nonlinear error for producing a linear output sense signal (V.sub.OUT) of the sensor (100) which is representative of the physical condition.

Inventors: Baskett; Ira E. (Tempe, AZ), McNeil; Andrew C. (Scottsdale, AZ)

Assignee: Motorola, Inc.

International Classification: G01L 1/22 (20060101); G01L 9/00 (20060101); G01L 9/06 (20060101); G01L 1/20 (20060101); G01B 007/16 ()

Expiration Date: 10/30/2018