Patent Number: 6,308,738

Title: Drafting apparatus

Abstract: A drafting apparatus in a furnace. A buffer board having a plurality of gas intakes is disposed in a front end of the drafting apparatus. A laminar flow board having a plurality of gas outtakes is disposed in a rear end of the drafting apparatus. A drafting region is enclosed by the drafting apparatus. The drafting region comprises at least one drafting board to draft and redirect the gas flow. A laminar flow is then obtained to flow through the outtakes on the laminar board.

Inventors: Liu; Tien-Jui (Taichung Hsien, TW), Chu; Eric (Hsinchu, TW), Chen; Tony (Chia-yi Hsiang, TW)

Assignee: United Microelectronics Corp.

International Classification: C30B 31/00 (20060101); C30B 31/16 (20060101); C30B 25/14 (20060101); C23C 16/44 (20060101); F23D 014/62 ()

Expiration Date: 10/30/2018