Patent Number: 6,308,776

Title: Temperature control apparatus with recirculated coolant

Abstract: A temperature control and process for adjusting the temperature of a workstation and a work medium at a workstation to a predetermined temperature. The temperature control comprises a cooling vehicle such as a heat exchanger, a coolant temperature sensor and control, a source of fluid coolant such as a manifold, a recirculating pump, a flow line to circulate the coolant to the workstation with the flow line containing a flow regulator and a heater, a bypass valve for bypassing the flow regulator and heater, and a workstation temperature sensor and control. The workstation temperature control controls the operation of the heater and bypass valve so that the temperature of the coolant is below the desired temperature for the workstation, thus achieving a rapid transient response while avoiding overcooling. The coolant temperature control and workstation temperature control may be in a temperature control computer, thus providing a large number of different operating sequences. A number of embodiments of workstations are also described.

Inventors: Sloan; Ben J. (Garland, TX), Reed; William G. (Richardson, TX)

Assignee: FSI International, Inc.

International Classification: B01L 7/00 (20060101); G03F 7/26 (20060101); G03F 7/20 (20060101); G05D 23/19 (20060101); G03F 7/16 (20060101); H01L 21/00 (20060101); F25B 029/00 ()

Expiration Date: 10/30/2018