Patent Number: 6,309,161

Title: Load lock with vertically movable support

Abstract: A load lock has a substrate carrier movable between one position and another position each position vertically separated from the other, to locate the carrier at vertically discrete positions to load substrates onto the carrier or remove substrates from the carrier. A ring seal is provided around the substrate carrier for opening and closing the load lock chamber to the vacuum transport apparatus by controllably vertically positioning it between an uppermost and a lowermost position within the load lock.

Inventors: Hofmeister; Christopher A. (Hampstead, NH)

Assignee: Brooks Automation, Inc.

International Classification: H01L 21/67 (20060101); H01L 21/00 (20060101); H01L 21/677 (20060101); H01L 021/00 ()

Expiration Date: 10/30/2018