Patent Number: 6,309,166

Title: Wafer transfer device

Abstract: A wafer transfer apparatus for taking out a wafer from a wafer cassette having grooves on both ends for holding circumferential edges of a plurality of wafers by moving a wafer transfer arm in height directions and back and forth directions relative to the wafer cassette. The apparatus comprises a wafer pushing out mechanism for pushing out a wafer on the back of a wafer inlet/outlet side of the wafer cassette into which the transfer arm is inserted. The wafer pushing out mechanism comprises a pushing pin rotatable when it is in contact with the wafer and a driving mechanism for driving the pushing pin so as to push the wafer from the back of the wafer cassette to the wafer inlet/outlet side.

Inventors: Kato; Tomoo (Hachioji, JP), Kimura; Keiji (Machida, JP)

Assignee: Olympus Optical Co., Ltd.

International Classification: H01L 21/67 (20060101); H01L 21/677 (20060101); B65G 049/07 ()

Expiration Date: 10/30/2018