Patent Number: 6,309,466

Title: Vapor deposition apparatus

Abstract: A method and apparatus for vapor depositing a release agent on a foil. The foil is wrapped around a cylindrical drum which is made of a porous material. The hollow inside of the drum forms a vapor space. The outer surface of the drum includes a thin metallic layer which has engraved or etched therein a pattern of surface passages. A vaporizer vessel provides a vaporized release agent which is conducted to the vapor space inside the drum. The release agent travels through the circumferential passages so as to be deposited in a pattern on the foil which is wrapped around the drum. A conforming body covers the circumferential surface not covered by the foil and can be heated to heat the drum.

Inventors: Klemm; Gunter (Nidda, DE), Neudert; Hans (Freigericht, DE)

Assignee: Leybold Systems GmbH

International Classification: C23C 14/04 (20060101); C23C 14/56 (20060101); C23C 016/00 ()

Expiration Date: 10/30/2018