Patent Number: 6,309,554

Title: Method for producing needle diamond-type structure

Abstract: A method of producing a needle-like diamond structure including the steps of forming a layer of anodized alumina on a diamond substrate, the anodized alumina having a plurality of through holes; vapor-depositing a substance resistant to plasma etching by a vacuum vapor-depositing method to form dots on said diamond substrate, wherein the layer of anodized alumina acts as a mask for the vapor deposition; removing the anodized alumina; and performing a plasma etching treatment while using the dots as a mask, thereby forming regularly-arranged, needle-like diamond columns.

Inventors: Fujishima; Akira (Kawasaki, JP), Masuda; Hideki (Hachioji, JP)

Assignee: The University of Tokyo

International Classification: H01J 9/02 (20060101); B81B 007/04 ()

Expiration Date: 10/30/2018