Patent Number: 6,309,618

Title: Method for treating exhaust gas containing fluorine-containing interhalogen compound, and treating agent and treating apparatus

Abstract: A treating method comprising contacting a fluorine-containing interhalogen compound first with a treating agent for the fluorine component and then with a treating agent for the halogen component, treating agents therefor, and a method for treating exhaust gas containing a fluorine-containing interhalogen compound, comprising filling a treating agent for the fluorine component into the internal cylinder of a treating apparatus having a double cylinder structure consisting of an internal cylinder and an external cylinder, filling a treating agent for the halogen component into the external cylinder, feeding exhaust gas containing a fluorine-containing interhalogen compound into the internal cylinder to travel the internal cylinder and the external cylinder in this order, and then discharging the treated gas from the external cylinder.

Inventors: Ohira; Manabu (Tokyo, JP), Torisu; Junichi (Kawasaki, JP), Hoshino; Yasuyuki (Kawasaki, JP), Sakai; Yuji (Kawasaki, JP), Kuznetsov; Andrei S. (Saint-Petersburg, RU)

Assignee: Showa Denko K. K.

International Classification: B01D 53/68 (20060101); C01B 7/00 (20060101); C01B 7/07 (20060101); C01B 007/00 (); B01D 047/00 (); B01D 050/00 (); C01D 003/02 (); C09K 003/00 ()

Expiration Date: 10/30/2018