Patent Number: 6,309,801

Title: Method of manufacturing an electronic device comprising two layers oforganic-containing material

Abstract: A method of manufacturing an electronic device with two layers oforganic-containing material which enables a structure with well-defineddimensions to be made in the layers of organic-containing material. Thisis accomplished through a series of steps of applying a first layer oforganic-containing material to a substrate, covering the it with a firstlayer of inorganic material, applying a second distinct layer of inorganicmaterial, providing a first mask layer of resist having first openings,and etching through the second layer of inorganic material at the firstopenings using an etch process where the second inorganic material isselectively etched with respect to the first inorganic material. The firstmask layer of resist is removed, and etching is performed through thefirst layer of inorganic material at the location of the first openings. Asecond layer of organic-containing material is applied and is covered witha third layer of inorganic material. A fourth layer of distinct inorganicmaterial is applied, and a second mask layer of resist having secondopenings is provided. Etching takes place through the fourth layer ofinorganic material at the second openings using an etch process where thefourth inorganic material is selectively etched with respect to the thirdinorganic material. The second mask layer of resist is removed, andetching through the third layer of inorganic material at the secondopenings takes place.

Inventors: Meijer; Petrus M. (Eindhoven, NL), Manders; Bartholome S. (Nijmegen, NL)

Assignee:

International Classification:

Expiration Date: 10/32013