Patent Number: 6,309,806

Title: Method of providing microscopic features

Abstract: A method of providing the inside surface of a hollow object with at least one microscopic feature, comprising the steps of coating at least a part of the inside surface with photo-sensitive material, directing light onto the material to photo-expose a selected portion of the material, removing the exposed selected portion or the unexposed material thereby to leave an opening through the coating, applying an etching substance to etch the inside surface through the opening to form a microscopic feature in the inside surface, characterized in that the light which is directed onto the photo-sensitive material comprises a collimated beam and during exposure, the beam and the inside surface are relatively moved so that the beam impinges upon the selected portion of the photo-sensitive coating to be exposed.

Inventors: Lenthall; John Stanley (Chesterfield, GB), Marples; Martin (Chesterfield, GB)

Assignee: GKN Sheepbridge Stokes Limited

International Classification: G03F 7/24 (20060101); G03F 007/18 (); G03F 007/24 ()

Expiration Date: 10/30/2018