Patent Number: 6,309,904

Title: Method of fabricating an optical integrated circuit

Abstract: A method of fabricating an optical integrated circuit comprising at leastone etched and buried BRS waveguide coupled to at least one etched but notburied ridge waveguide includes defining an imprint for the two types ofguide beforehand, using a common mask, and then defining the two types ofguide by successive etching operations.

Inventors: Pommereau; Frederic (Lardy, FR), Pagnod-Rossiaux; Philippe (St Germain les Arpajon, FR), Renaud; Monique (Saint Cheron, FR), Martin; Bernard (La Varenne St Hilaire, FR), Mestric; Roland (Paris, FR)

Assignee:

International Classification:

Expiration Date: 10/32013