Patent Number: 6,309,930

Title: SRAM cell arrangement and method for manufacturing same

Abstract: The SRAM cell arrangement comprises six MOS transistors per memory cell that are fashioned as vertical transistors. The MOS transistors are arranged at sidewalls of trenches (G1, G2, G4). Parts of the memory cell such as, for example, gate electrodes (Ga2, Ga4) or conductive structures (L3) fashioned as spacer are contacted via adjacent, horizontal, conductive structures (H5) arranged above a surface (O) of a substrate (S). Connections between parts of memory cells ensue via third conductive structures (L3) arranged at the sidewalls of the depressions and word lines (W) via diffusion regions (D2) that are adjacent to the sidewalls of the depressions within the substrate (S), via first bit lines, via second bit lines (B2) or/and via conductive structures (L1, L2, L6) that are partially arranged at different height with respect to an axis perpendicular to the surface (O). Contacts (K5) contact a plurality of parts of the MOS transistors simultaneously.

Inventors: Goebel; Bernd (Munchen, DE), Bertagnolli; Emmerich (Munchen, DE), Willer; Josef (Riemerling, DE), Hasler; Barbara (Stockdorf, DE), von Basse; Paul-Werner (Wolfratshausen, DE)

Assignee: Siemens Aktiengesellschaft

International Classification: H01L 21/70 (20060101); H01L 27/11 (20060101); H01L 21/8244 (20060101); H01L 021/336 ()

Expiration Date: 10/30/2018