Patent Number: 6,310,018

Title: Fluorinated solvent compositions containing hydrogen fluoride

Abstract: A homogeneous compositions containing a fluorinated solvent, hydrogen fluoride, and a co-solvent, and the use of these compositions for cleaning and etching of substrates is described.

Inventors: Behr; Frederick E. (Woodbury, MN), Zazzera; Lawrence A. (Edina, MN), Rajtar; Paul E. (Hugo, MN), Parent; Michael J. (Oakdale, MN)

Assignee: 3M Innovative Properties Company

International Classification: C11D 7/50 (20060101); C11D 7/08 (20060101); C11D 11/00 (20060101); C11D 7/02 (20060101); H01L 21/02 (20060101); H01L 21/306 (20060101); C09K 013/00 (); C11D 007/52 ()

Expiration Date: 10/30/2018