Patent Number: 6,310,228

Title: Organic copper compound, liquid mixture containing the compound, and copperthin-film prepared using the solution

Abstract: An organic copper compound is provided that is represented by the followingformula (1) in which monovalent copper is coordinated with a.beta.-diketone compound and an unsaturated hydrocarbon compound having asilyloxy group:##STR1##wherein R Is an unsaturated hydrocarbon moiety, L is the .beta.-diketonecompound, X.sub.1, X.sub.2, and X.sub.3 are each a hydrogen atom, an alkylgroup having 1 to 5 carbon atoms, or an alkoxy group having 1 to 4 carbonatoms, and X.sub.1, X.sub.2, and X.sub.3 may be the same or different fromeach other. The organic copper compound is barely decomposed in a stocksolution before use, has a prolonged storage life, exhibits a high filmdeposition rate, can be effectively decomposed on a substrate, is highlyvolatile, and exhibits high adhesiveness to an underlayer.

Inventors: Itsuki; Atsushi (Ohmiya, JP), Ogi; Katsumi (Ohmiya, JP)


International Classification:

Expiration Date: 10/32013