Patent Number: 6,310,342

Title: Optical microscope stage for scanning probe microscope

Abstract: Scanning probe microscopes and scanning probe heads are provided having improved optical visualization and sample manipulation capabilities. The SPMs and SPM heads include at least one flexure stage for scanning in the x, y and/or z directions. In a preferred embodiment, the SPMs or SPM heads include flexure stages for scanning in the x, y and z directions. The z scanning stage is preferably positioned outside the lateral footprint of the x-y flexure stage so that a probe extending from the z scanning stage is outside the lateral footprint of the instrument. The SPMs and SPM heads are configured to provide top down and bottom up optical views of the sample and/or the probe and enable simultaneous scanning probe microscopy and optical imaging of a sample to be performed. The SPMs and SPM heads are designed to be readily combinable with existing upright and inverted optical microscopes currently available from various major manufacturers.

Inventors: Braunstein; David (Campbell, CA), Kirk; Michael (San Jose, CA), Ly; Quoc (San Jose, CA), Nguyen; Thai (Sunnyvale, CA)

Assignee: ThermoMicroscopes Corporation

International Classification: G01N 27/00 (20060101); G01B 7/34 (20060101); G01N 21/01 (20060101); G02B 21/18 (20060101); H01J 37/26 (20060101); H01J 37/20 (20060101); H01J 037/20 (); G02B 021/18 (); G01N 021/01 ()

Expiration Date: 10/30/2018