Patent Number: 6,310,343

Title: Electron impact elastic recoil hydrogen atom analyzer

Abstract: An electron impact elastic recoil hydrogen atom analyzer includes an electron gun that projects an electron beam on a surface of a specimen for electron bombardment to make hydrogen atoms contained in the specimen elastically recoil, a hydrogen detecting unit that detects hydrogen atoms emitted from the specimen, and a data processing unit that determines a depth-distribution of hydrogen in the specimen on the basis of data provided by the hydrogen detecting unit. The hydrogen detecting unit includes an ionizer for ionizing hydrogen atoms emitted from the specimen, a deflector for energy analysis of hydrogen ions, and an electron multiplying channel plate for detecting the deflected hydrogen ions.

Inventors: Koyama; Akio (Wako, JP), Horiki; Tsuyoshi (Wako, JP), Yoneda; Akira (Nerima-Ku, JP)

Assignee: Riken

International Classification: G01N 23/225 (20060101); G01N 23/22 (20060101); G01N 023/00 (); G21K 007/00 ()

Expiration Date: 10/30/2018