Patent Number: 6,310,362

Title: Electro-optical device

Abstract: A display device is disclosed. The display device comprises a glass substrate, and an insulating film provided on the glass substrate and comprising aluminum nitride containing from 0.01 to 20% by atomic of oxygen therein with respect to nitrogen. A thin film transistor and a pixel electrode are provided over the insulating film.

Inventors: Takemura; Yasuhiko (Atsugi-shi, Kanagawa-ken, 243, JP)

Assignee:

International Classification: H01L 21/02 (20060101); H01L 21/70 (20060101); H01L 21/336 (20060101); H01L 21/20 (20060101); H01L 21/84 (20060101); H01L 029/04 (); H01L 031/20 (); H01L 031/036 (); H01L 031/037 ()

Expiration Date: 10/30/2018