Patent Number: 6,310,483

Title: Longitudinal type high frequency probe for narrow pitched electrodes

Abstract: A high-frequency probe according to the present invention comprises a probe chip that has an end part that is pressed to an electrode and is covered by a electrically conductive outer enclosure, and slides in a vertical direction by an inner surface of this electrically conductive outer enclosure inside this electrically conductive outer enclosure. A signal conductive pattern is fixed inside this probe chip and is connected with a inner conductor having elasticity. The inner conductor can be bent in the vertical direction at a central part of a hole having an opening, which is sufficiently long in the vertical direction, in the center space of a ground conductor, which is fixed to an end part of the main block, when the inner conductor is pressed due to contact of the end part. In addition, the high-frequency probe has a thin shape of a maximum thickness in a transverse direction which is perpendicular to the vertical direction that is a direction of the probe being pressed to a device electrode. The maximum thickness is substantially equal to a pitch between device electrodes, and can be formed in the construction of unifying a plurality of high-frequency probes.

Inventors: Taura; Toru (Tokyo, JP), Inoue; Hirobumi (Tokyo, JP), Tanehashi; Masao (Tokyo, JP), Matsunaga; Kouji (Tokyo, JP), Yamagishi; Yuuichi (Kanagawa, JP), Hayakawa; Satoshi (Kanagawa, JP), Tsugane; Hironori (Kanagawa, JP)

Assignee: NEC Corporation

International Classification: G01R 1/067 (20060101); G01R 031/02 ()

Expiration Date: 10/30/2018