Patent Number: 6,310,685

Title: Apparatus and method for holding a green sheet and system and method for inspecting a green sheet

Abstract: A green sheet holding apparatus includes a first member secured to a first edge of the green sheet and a second member moveable relative to the first member, the second member being secured to a second edge of the green sheet. A forcing mechanism, connected to the second member and to the first member, forces the second member away from the first member such that the first edge and the second edge of the green sheet are forced away from each other and the green sheet is flattened. The holding apparatus may be included in a green sheet inspection system, wherein the inspection system further includes a light source directing a light onto the green sheet and a camera detecting light from the green sheet. The invention also includes a method of holding a green sheet, which includes securing the first edge of the green sheet to a first member, securing the second edge of the green sheet to a second member, and forcing the second member away from the first member. This method pulls the first edge and the second edge of the green sheet outwardly, thereby flattening the green sheet. The method may be part of a method of inspecting a screened pattern on a green sheet, which further includes directing a light onto a the green sheet and detecting the light as it emerges from the green sheet.

Inventors: Baan; Robert L. (Wallkill, NY), Goring; James O. (Staatsburg, NY), Graboski; David Scott (Wappingers Falls, NY), Lankard, Jr.; John R. (Poughkeepsie, NY), Muller; Kurt R. (Hopewell Junction, NY), Turcotte; Raymond H. (Hopewell Junction, NY)

Assignee: International Business Machines Corporation

International Classification: H01L 21/00 (20060101); G01N 021/01 (); G01N 021/88 ()

Expiration Date: 10/30/2018