Patent Number: 6,310,688

Title: Method for measuring the parameter of a rough film

Abstract: A method for measuring the parameter of a rough film is presented in this invention. In which the optical property of a rough film is further defined by utilizing the characteristics of an optical instrument and silicon film, without disturbance from noise in measurement. Therefore, good or bad the rough film is can be detected effectively, further, a handy method can be offered to control the stability in the manufacturing process. The invention is performed by choosing a measuring light with wavelength in a certain range and an optical instrument, then comparing the result with a standard value to monitor the result of the manufacturing process of the rough film.

Inventors: Kao; Ming-Kuan (Hsinchu, TW), Chu; Jason C. S. (Taipei, TW)

Assignee: Mosel Vitelic Inc.

International Classification: G01B 11/06 (20060101); G01J 004/00 ()

Expiration Date: 10/30/2018