Patent Number: 6,310,727

Title: Beam homogenizer, laser illumination apparatus, and semiconductor device

Abstract: A beam homogenizer at least includes a first optical lens for dividing a light beam into N(n'-1) beams in a vertical direction, a second optical lens for dividing the light beam into (2n+1) beams in a horizontal direction, a third optical lens for recombining the beams that are divided in the vertical and horizontal directions into (n'-1) beams while superimposing the (n'-1) beams so that they are deviated from each other in the horizontal direction, and a fourth optical lens for recombining the beams that are divided in the vertical direction.

Inventors: Tanaka; Koichiro (Kanagawa, JP)

Assignee: Semiconductor Energy Laboratory Co., Ltd.

International Classification: G02B 27/09 (20060101); H01L 21/02 (20060101); H01L 21/20 (20060101); G02B 027/10 (); G02B 013/08 ()

Expiration Date: 10/30/2018