Patent Number: 6,310,905

Title: Mirror for an ultraviolet laser and method

Abstract: A mirror for an ultraviolet laser and method of formation such that the mirror is highly reflective to a laser beam generated in the ultraviolet spectrum over a wide range of incident angles and has little fluctuation in polarization reflectivity in relation to a change in an incident angle of the beam. The mirror has a structure comprising an aluminum (Al) film coated over a substrate and a dielectric multi-layer film coated over the aluminum film. The dielectric multi-layer film comprises alternating layers of a low refractive index layer and a high refractive index layer according to the following relationship: L.sub.1 /[H/L.sub.2 ].sup.x and with an optical thickness according to the following relationship: or wherein: L.sub.1, L.sub.2 : represents the low refractive index layers; H: represents the high refractive index layer(s); and X: is an integer between 1 to 10.

Inventors: Shirai; Takeshi (Tokyo, JP)

Assignee: Nikon Corporation

International Classification: G02B 5/08 (20060101); H01S 3/08 (20060101); H01S 003/08 (); G02B 005/08 ()

Expiration Date: 10/30/2018