Patent Number: 6,332,275

Title: Margin inspector for IC wafers

Abstract: A margin inspector for IC wafers includes an upper plate and a supporting portion. The upper plate, which is formed as a transparent plate, has a plurality of concentric circular segments thereon for establishing a set of reference lines to examine the periphery ring of the wafer located under the upper plate while in examining operation. The supporting portion connected with the upper plate is used to form a working space, between the supporting portion and the upper plate, for accommodating the wafer to be examined. By applying these inspecting lines, any deviation on the washout periphery ring of the wafer can be easily and correctly located by eyesight.

Inventors: Tsai; Wen-Wang (Hsinchu, TW), Wu; Chun-Yan (YiLan, TW)

Assignee: Mosel Vitelic Inc.

International Classification: G01B 5/08 (20060101); G01B 11/08 (20060101); G01B 003/14 ()

Expiration Date: 12/25/2018