Patent Number: 6,332,322

Title: Electronic device having a thermally isolated element

Abstract: An electronic device includes a thermally isolated element formed above a substrate such that the thermally isolated element is isolated from the substrate by a cavity, a thermal-to-electrical transducer for converting heat to an electrical signal, an electrical-to-thermal transducer for converting an electrical signal to heat, a functional material whose physical property changes at a particular temperature, and a circuit, formed on the substrate, for controlling the electrical-to-thermal transducer in accordance with a signal received from the thermal-to-electrical transducer. The thermal-to-electrical transducer, the electrical-to-thermal transducer, and the functional material are formed in the thermally isolated element.

Inventors: Tanaka; Akio (Tokyo, JP)

Assignee: NEC Corporation

International Classification: H01L 35/12 (20060101); H01L 35/00 (20060101); H01L 35/22 (20060101); H01L 35/08 (20060101); H01S 5/00 (20060101); H01S 5/026 (20060101); F25B 21/02 (20060101); F25B 021/02 ()

Expiration Date: 12/25/2018