Patent Number: 6,332,425

Title: Surface treatment method and system

Abstract: A pulse voltage of duty ratio 5% or below and repetition frequency 400 KHz or above is supplied in order to suppress the notch, charge build-up damage, subtrench and bowing due to the electron shading phenomenon. Thus, a cycle for accelerating electrons occurs in the substrate bias, so that the electron shading phenomenon does not occur.

Inventors: Kofuji; Naoyuki (Naka-1-chome, Kunitachi-shi, JP), Arai; Shin (Kodaira-shi, JP), Tsujimoto; Kazunori (Higashiyamato-shi, JP), Mizutani; Tatsumi (Koganei-shi, JP), Suzuki; Keizo (Kodaira-shi, JP), Mizuishi; Kenichi (Hachioji-shi, JP)


International Classification: H01J 37/32 (20060101); C23C 016/00 ()

Expiration Date: 12/25/2018