Patent Number: 6,332,470

Title: Aerosol substrate cleaner

Abstract: An apparatus for cleaning a substrate includes a source of pressurizedcarrier gas and a body of cleaning agent in liquid form. A first conduitdirects the pressurized carrier gas from the carrier gas source to thebody of cleaning agent. A second conduit carries a flow of the carrier gasaway from the body of the cleaning agent. The carrier gas flow carried bythe second conduit includes cleaning agent in vapor form acquired from thebody of cleaning agent. A nozzle is coupled to the second conduit to causedroplets of the cleaning agent to impinge upon a first face of thesubstrate to be cleaned.

Inventors: Fishkin; Boris (San Carlos, CA), Brown; Kyle A. (Sunnyvale, CA)


International Classification: B08B 3/00 (20060101); B08B 5/00 (20060101); H01L 21/306 (20060101); H01L 21/00 (20060101); H01L 21/02 (20060101); B08B 003/02 ()

Expiration Date: 12/25/2014