Patent Number: 6,332,525

Title: Vacuum chamber for flat substrates

Abstract: A vacuum chamber for flat substrates features transport rollers for transport of the substrates. These transport rollers are held from the sides in bearings and are additionally braced between the bearings by at least one middle bearing. These middle bearings are each located on a plunger which is guided hermetically through an opening in the bottom of the vacuum chamber and is braced against a support underneath the bottom.

Inventors: Gebele; Thomas (Freigericht, DE), Rodling; Gert (Obertshausen, DE)

Assignee: Leybold Systems GmbH

International Classification: C03C 17/00 (20060101); C23C 14/56 (20060101); B65G 013/00 ()

Expiration Date: 12/25/2018