Patent Number: 6,332,709

Title: Contact temperature probe with thermal isolation

Abstract: A contact temperature probe having a probe head which includes a temperature sensor having lead wires which exit the head and run through a shield for shielding the wires from the process, wherein the probe head is supported for pivoting motion only by the lead wires and the shield is thermally isolated from the probe head.

Inventors: Burke; John W. (McLean, VA), Cardoso; Andre B. (Braga, PT), McGinnity; Joseph G. (Gaithersburg, MD)

Assignee: Axcelis Technologies, Inc.

International Classification: G01K 1/14 (20060101); G01K 1/00 (20060101); G01K 1/16 (20060101); G01K 001/12 (); G01K 001/14 (); G01K 001/18 (); G01K 007/04 ()

Expiration Date: 12/25/2018