Patent Number: 6,332,744

Title: Automatic warehouse and transfer system using the same

Abstract: A mast 18 of an automatic warehouse 10 is extended to a position under afloor 2 in a clean room in such a manner as to penetrate the floor 2, anda turn table 16 is installed under the floor. In addition, two types ofstations, that is, a floor station 26 and an underfloor station 30 areprovided, and shelves 14 are provided only in a floor space. The floorstation 26 is connected to an unmanned carrier 34, while the underfloorstation 30 is connected to a tracked cart 36. This automatic warehouse iseasy to install and allows an underfloor space to be used to transferarticles.

Inventors: Fukushima; Masazumi (Aichi, JP), Kawaguchi; Masatomi (Kagamihara, JP)

Assignee:

International Classification: B65G 1/04 (20060101); H01L 21/67 (20060101); H01L 21/677 (20060101); B65G 001/00 (); B65G 065/00 ()

Expiration Date: 12/25/2014