Patent Number: 6,332,820

Title: Planar display device manufacturing method

Abstract: To manufacture a field-emitting type cathode of a planar display device at a high accuracy, the following steps are included: the step of forming a first electrode (11) on a substrate (1) and a an electron emitting portion (9) on the electrode (11), forming an insulating layer (7) on an area including the first electrode (11) and electron emitting portion (9), and forming an electrode layer (121) serving as a second electrode on the insulating layer (7); the step of forming a negative type photoresist layer (30) on the entire surface including the electrode layer (121), exposing the photoresist layer (30) by using the electron emitting portion (9) as a mask and thereby applying ultraviolet radiation (31) from the back of the substrate (1), and selectively removing a photoresist layer (301) at a portion corresponding to the electron emitting portion (9) by developing the layer (30); and the step of forming an opening from which the electron emitting portion (9) is exposed by using the remaining photoresist layer (301) as a mask and thereby selectively etching the electrode layer (121) and insulating layer (7).

Inventors: Shimamura; Toshiki (Kanagawa, JP), Inoue; Kouji (Kanagawa, JP)

Assignee: Sony Corporation

International Classification: H01J 9/02 (20060101); H01J 009/02 ()

Expiration Date: 12/25/2018