Patent Number: 6,332,835

Title: Polishing apparatus with transfer arm for moving polished object without drying it

Abstract: A polishing apparatus that can effectively and efficiently remove potassium and other alkaline metals comprises integrally a polishing unit for polishing an object by means of a polishing agent and a cleaning unit for cleaning the polished object. The polishing unit and the cleaning unit have means for isolating the internal atmosphere from the external atmosphere and the cleaning unit has a means for cleaning the polished object by bringing hot pure water or steam of pure water into contact with the polished object. With a cleaning method hot pure water is brought into contact with the polished object without drying it after having been polished by such a polishing apparatus.

Inventors: Nishimura; Matsuomi (Omiya, JP), Ban; Mikichi (Haga-machi, JP), Takahashi; Kazuo (Kawasaki, JP), Ikeda; Osamu (Yokohama, JP)

Assignee: Canon Kabushiki Kaisha

International Classification: B08B 3/04 (20060101); B08B 3/00 (20060101); B24B 37/04 (20060101); B24B 57/00 (20060101); B24B 57/02 (20060101); H01L 21/00 (20060101); B24B 007/00 ()

Expiration Date: 12/25/2018