Patent Number: 6,332,928

Title: High throughput OMPVE apparatus

Abstract: A cold wall reactor having inner and outer walls defining an annularreactor cell. A susceptor is rotatably mounted in the cell, and receivedwafers to be treated by gases flowing axially through the cell. The outerwall of the reactor is normally cooled, but is heated by a suitablefurnace to provide a hot wall reactor when cleaning of the cell isrequired.

Inventors: Shealy; J. Richard (Ithaca, NY), Butterfield; Barry P. (Ithaca, NY)


International Classification: C30B 25/08 (20060101); C23C 16/455 (20060101); C23C 16/44 (20060101); C30B 25/14 (20060101); C23C 016/00 ()

Expiration Date: 12/25/2014