Patent Number: 6,333,065

Title: Process for the production of an organic electroluminescent device

Abstract: An apparatus and a process for the production of an organic EL device, which permits a high freedom of apparatus designing, permits effective processing and gives an organic EL device having a high light emission efficiency and excellent device characteristics, the apparatus comprising means of cleaning a surface of a substrate on which at least a hole-injecting electrode is formed, and means of forming an organic layer on the cleaned surface of the substrate, the cleaning means being for performing the cleaning with ozone gas generated with the ozonizer.

Inventors: Arai; Michio (Tokyo, JP), Nakaya; Kenji (Chiba, JP)

Assignee: TDK Corporation

International Classification: C23C 14/12 (20060101); C23C 14/34 (20060101); H01L 51/40 (20060101); H01L 51/05 (20060101); H01L 51/50 (20060101); H01L 51/52 (20060101); H01L 51/30 (20060101); B05D 003/04 (); B05D 005/06 (); B05D 005/12 ()

Expiration Date: 12/25/2018