Patent Number: 6,444,980

Title: Apparatus for production and extraction of charged particles

Abstract: The apparatus comprises a sample, an optical element (4) in the form of a truncated pyramid having at least one reflective surface (1a) and a hole (7). A laser (18) directs radiation on to the sample via the reflective surface (1a) and the charged particles are extracted and directed along an extraction axis through the hole (7).

Inventors: Kawato; Eizo (Cheadle, GB), Smith; Alan Joseph (Manchester, GB), Tanaka; Koichi (Sale, GB)

Assignee: Shimazdu Research Laboratory (Europe) Ltd.

International Classification: H01J 49/10 (20060101); H01J 49/04 (20060101); H01J 49/02 (20060101); H01J 49/16 (20060101); H01J 049/16 (); H01J 049/00 (); B01D 059/44 ()

Expiration Date: 09/03/2019