Patent Number: 6,480,519

Title: Gas laser device that emits ultraviolet rays

Abstract: To reduce the cross-sectional area of a discharge circuit loop in the excitation circuit of a gas laser device that discharges ultraviolet rays, thereby reducing the inductance and enhancing the laser oscillation efficiency, the gas laser device is provided with a laser chamber (1) in which laser gas is sealed and which has a circulation means that circulates the laser gas within the chamber, a pair of main discharge electrodes (3, 4) disposed at a prescribed separation within said laser chamber (1), a discharge circuit having peaking capacitors (C.sub.3) that are connected in parallel with the pair of main discharge electrodes (3, 4,) and a preionization unit (15) in which a first electrode (9) and a second electrode (7) are disposed facing each other with a dielectric (8) interposed between them, the preionization unit (15) being disposed running along each side of one of the main discharge electrodes (4), that one of the main discharge electrodes (4) and the peaking capacitors (C.sub.3) being connected via a conduction member (25) that passes between the one of the main discharge electrodes (4) and the preionization unit (15).

Inventors: Kakizaki; Koji (Mishima, JP), Arai; Motohiro (Kawasaki, JP)

Assignee: Ushiodenki Kabushiki Kaisha

International Classification: H01S 3/038 (20060101); H01S 003/097 ()

Expiration Date: 11/12/2019