Patent Number: 6,480,643

Title: On-chip multiple layer vertically transitioning optical waveguide and damascene method of fabricating the same

Abstract: An optical waveguide extends vertically within the interior of an IC-like structure to route optical signals between horizontal waveguides in different layers of horizontal optical interconnects. A light reflecting structure is positioned at the intersection of the horizontal and vertical waveguides to reflect the light. Multiple horizontal waveguides may join the vertical waveguide at a common intersection, to form a beam splitter or a beam combiner. Optical signals from one horizontal waveguide are diverted within the IC-like structure into another horizontal or vertical waveguide. The waveguide is formed with a light reflective structure at an intersection of the horizontal and vertical waveguides, and the waveguide is completed using damascene fabrication techniques.

Inventors: Allman; Derryl D. J. (Colorado Springs, CO), Hornbeck; Verne C. (Colorado Springs, CO)

Assignee: LSI Logic Corporation

International Classification: G02B 6/132 (20060101); G02B 6/125 (20060101); G02B 6/13 (20060101); G02B 6/12 (20060101); G02B 6/136 (20060101); G02B 006/12 ()

Expiration Date: 11/12/2019