Patent Number: 6,490,536

Title: Integrated load simulator

Abstract: A load simulator and switch are connected to a power source of a plasmaprocessing device. The switch allows the load simulator to be electricallyconnected to the power source to allow testing of the power source. Theswitch and load simulator allow the testing of the power source withoutmechanically removing the power source from the plasma processing device.In addition, the switch allows the connection of the load simulator to thepower source while the power source is on, avoiding the requirement ofturning off the power source before connecting the load simulator.

Inventors: Ellingboe; Albert R. (Lucan, IE), Morel; Bruno (Santa Clare, CA)

Assignee:

International Classification: H01J 37/32 (20060101); C23C 016/50 (); G06F 015/00 ()

Expiration Date: 12/02015