Patent Number: 6,512,364

Title: Testing sensor

Abstract: A sensor comprises a semiconductor pellet (10) including a working portion(11) adapted to undergo action of a force, a fixed portion (13) fixed onthe sensor body, and a flexible portion (13) having flexibility formedtherebetween, a working body (20) for transmitting an exterted force tothe working portion, and detector means (60-63) for transforming amechanical deformation produced in the semiconductor pellet to an electricsignal to thereby detect a force exerted on the working body as anelectric signal. A signal processing circuit is applied to the sensor.This. circuit uses analog multipliers (101-109) and analogadders/subtracters (111-113), and has a function to cancel interferenceproduced in different directions. Within the sensor, two portions (E3,E4-E8) located at positions opposite to each other and producing adisplacement therebetween by action of a force are determined. By exertinga coulomb force between both the portions, the test of the sensor iscarried out. Further, a pedestal (21, 22) is provided around the workingbody (20). The working body and the pedestal are located with apredetermined gap or spacing therebetween. A displacement of the workingbody is caused to limitatively fall within a predetermined rangecorresponding to the spacing. The working body and the pedestal areprovided by cutting a same common substrate (350, 350').

Inventors: Okada; Kazuhiro (Ageo-shi, Saitama 362, JP)

Assignee:

International Classification: G01L 25/00 (20060101); G01L 5/16 (20060101); G01P 21/00 (20060101); G01P 15/12 (20060101); G01P 15/125 (20060101); G01P 15/18 (20060101); G01L 1/18 (20060101); G01L 1/14 (20060101); G01P 015/12 ()

Expiration Date: 01/22015