Patent Number: 6,513,388

Title: Micromechanical precision silicon scale

Abstract: The invention concerns a silicon micromechanical weight sensor (26). According to the invention, the weight sensor comprises at least two conducting electrodes (2, 15) displaced at a distance from each other, whereby one of the elastically suspended electrode surfaces (2) or, alternatively, a structure connected thereto, acts as the pan surface of the weight sensor.

Inventors: Oja; Aarne (Espoo, FI), Seppa ; Heikki (Helsinki, FI), Sillanpaa; Teuvo (Helsinki, FI)

Assignee: Valtion Teknillinen Tutkimuskeskus

International Classification: G01G 3/00 (20060101); G01G 3/12 (20060101); G01G 7/06 (20060101); G01G 7/00 (20060101); G01B 007/16 ()

Expiration Date: 02/04/2011