Patent Number: 6,515,264

Title: Heater

Abstract: A rod-shaped heater provided is composed of a carbon wire heating element 2 sealed in a small or large diameter quartz glass tube, a small diameter quartz glass tube portions 3a and 3b charged with compressed wire carbon members at opposite ends thereof; a sealed terminal section 10 having connection lines 11a and 11b for power supply held between the compressed wire carbon members charged in the small diameter quartz glass tube. The connection lines and the carbon wire heating element are electrically connected by way of the wire carbon members. This rod-shaped heater using the carbon wire heating element is suitable for readily raising the temperature of the agent in the storage tank of the wet etching agent or the grinding agent.

Inventors: Toya; Eiichi (Oguni-machi, JP), Konn; Tomio (Oguni-machi, JP), Nagata; Tomohiro (Oguni-machi, JP), Saito; Norihiko (Oguni-machi, JP), Yamamura; Shigeru (Oguni-machi, JP), Nakao; Ken (Sagamihara, JP), Saito; Takanori (Sagamihara, JP), Osanai; Hisaei (Sagamihara, JP), Makiya; Toshiyuki (Tokyo, JP)

Assignee: Toshiba Ceramics Co., Ltd.

International Classification: H05B 3/00 (20060101); H05B 003/10 ()

Expiration Date: 02/04/2020