Patent Number: 6,515,381

Title: Cantilever stage

Abstract: A cantilever stage for precision movement and positioning an article suchas a reticle in an electron beam photolithography system is disclosed. Thecantilever stage comprises a cantilevered support platform for supportingthe article extending from a movable member. The cantilever stage issupported by at least one elongate guide extending through a channeldefined by the movable member. The cantilever stage may be driven by oneor more actuators mechanically coupled to the movable member to move andposition the cantilever stage in a first direction along the elongateguide. The actuator may be any suitable actuator such as anelectromagnetic drive motors. The movable portion defines an open regionwhich includes the center of gravity of the cantilever stage and isconfigured to receive a counterbalance or reaction force balancing device.The cantilever stage may also be driven in a second direction, generallyperpendicular to the first direction, by an actuator mechanically coupledto the elongate guide.

Inventors: Novak; W. Thomas (Hillsborough, CA), Kovalerchik; Michael (Castro Valley, CA)


International Classification: B23Q 11/00 (20060101); B23Q 1/26 (20060101); G03F 7/20 (20060101); H01J 37/20 (20060101); H01J 37/317 (20060101); H02K 41/02 (20060101); H02K 16/00 (20060101); G03B 027/42 (); H02K 041/00 ()

Expiration Date: 02/02015