Patent Number: 6,529,093

Title: Microelectromechanical (MEMS) switch using stepped actuation electrodes

Abstract: A microelectromechanical (MEMS) switch is described. The switch comprises a cantilever beam having a proximal end and a distal end. The cantilever beam is supported by its proximal end above a substrate by a raised anchor. An intermediate actuation electrode is placed beneath the cantilever beam and is separated from the bottom of the cantilever beam by a narrow gap. Finally, a contact pad or transmission line is placed beneath the cantilever beam and separated from the bottom of the cantilever beam by a larger gap.

Inventors: Ma; Qing (San Jose, CA)

Assignee: Intel Corporation

International Classification: H01H 59/00 (20060101); H01P 1/12 (20060101); H01P 1/10 (20060101); H01P 001/10 ()

Expiration Date: 03/04/2011