Patent Number: 6,612,120

Title: Spray cooling with local control of nozzles

Abstract: A semiconductor chip cooling system configured with thermal inkjet typesprayers controlled by a control system. The control system can operategroups of the sprayers at different rates to controllably cool separateregions of a chip at different rates. A detection system is configured toseparately detect the cooling regime occurring on the different regions ofthe chip by reflecting an optical beam off the chip in the region that isbeing sprayed.

Inventors: Patel; Chandrakant D. (Fremont, CA), Bash; Cullen E. (San Francisco, CA)


International Classification: G06F 1/20 (20060101); H01L 23/34 (20060101); H01L 23/473 (20060101); F25D 19/00 (20060101); F28D 003/00 (); F25D 023/12 (); H05K 007/20 ()

Expiration Date: 09/02015