Patent Number: 6,612,176

Title: Pressure transducer assembly with thermal shield

Abstract: A capacitive pressure transducer including a heater shell, a capacitive pressure sensor, an electronics assembly and a thermal barrier is presented. The sensor and the electronics assembly are disposed in the heater shell. The thermal barrier is also disposed in the heater shell and is disposed between the sensor and electronics assembly.

Inventors: Poulin; James M. (Derry, NH), Mathew; Santhi E. (Londonderry, NH), Mindlin; Leonid (South Natick, MA), Quigley; Claudia J. (Lexington, MA), Blankenship; Stephen D. (Melrose, MA)

Assignee: MKS Instruments, Inc.

International Classification: G01L 19/14 (20060101); G01L 9/00 (20060101); G01L 19/00 (20060101); G01L 19/04 (20060101); G01L 019/04 ()

Expiration Date: 09/02/2020