Patent Number: 6,617,248

Title: Method for forming a ruthenium metal layer

Abstract: A method for forming a ruthenium metal layer comprises combining aruthenium precursor with a measured amount of oxygen to form a rutheniumoxide layer. The ruthenium oxide is annealed in the presence of ahydrogen-rich gas to react the oxygen in the ruthenium oxide withhydrogen, which results in a ruthenium metal layer. By varying the oxygenflow rate during the formation of ruthenium oxide, a ruthenium metal layerhaving various degrees of smooth and rough textures can be formed.

Inventors: Yang; Sam (Boise, ID)


International Classification: C23C 16/56 (20060101); C23C 16/40 (20060101); H01L 21/02 (20060101); H01L 21/285 (20060101); H01L 021/44 ()

Expiration Date: 09/02015