Patent Number: 6,637,314

Title: Actuator

Abstract: An air is evacuated from a chamber of a bellows by a vacuum pressure supply source connected to a vacuum port of an attachment plate. The vacuum pressure in a vacuum chamber is thus balanced with the vacuum pressure in the chamber of the bellows. Consequently, the bellows is prevented from expanding by balancing the respective vacuum pressures in the chamber of the bellows and in the vacuum chamber.

Inventors: Nagai; Shigekazu (Adachi-ku, JP), Saitoh; Akio (Kawaguchi, JP), Miyahara; Masaki (Kitasoma-gun, JP)

Assignee: SMC Kabushiki Kaisha

International Classification: F15B 15/14 (20060101); F15B 15/00 (20060101); F15B 15/20 (20060101); F01B 009/00 ()

Expiration Date: 10/28/2011