Patent Number: 6,670,622

Title: Electron exposure device and method and electronic characteristics evaluation device using scanning probe

Abstract: Current passed through a resist layer or insulating layer is controlled by changing the amplitude of an AC voltage to provide an electron exposure device or electric characteristics evaluation device using a scanning probe.

Inventors: Heike; Seiji (Hatoyama, JP), Ishibashi; Masayoshi (Hatoyama, JP), Hashizume; Tomihiro (Hatoyama, JP)

Assignee: Hitachi, Ltd.

International Classification: H01J 37/317 (20060101); A61N 005/00 (); G21G 005/00 (); G21K 005/10 (); H01J 037/08 (); H01L 021/31 ()

Expiration Date: 12/30/2012